1·Parylene is a newly developed macromolecular material, first prepared by the Union Carbide Corporation of the U.
聚对二甲苯是一种新型高分子材料,自一九六五年美国联合碳化物公司(简称U。
2·The paper focuses on vacuum vapor deposition for making parylene film which is used in many targets. The experiment facility and principle are described too.
介绍了真空气相沉积法制备聚对二甲苯薄膜的实验设备、实验原理和实验方法。