1·The rudiments of microneedle actuator have been developed, which is mainly made of SU 8 photoresist, and its 3D construction is fabricated by multistep exposal and electroforming metal.
利用SU - 8光刻胶为主要材料，采用多级曝光和电铸金属实现3D结构的工艺技术，研制出了微针执行器的雏形器件。
2·Dynamic holographic interferometry measurement, which is twice exposal holographic interferometry, is realized through ruby double pulse laser.
采用红宝石双脉冲激光器，实现了动态全息干涉法测量，即两次曝光全息干涉法。
3·Uniformity of the photoresist film, adhesiveness between underlay and glue film, exposal and develop condition of high thickness difference are all solved in the thesis.
在厚胶光刻工艺中重点解决了胶膜厚度的均匀性、胶膜与衬底的粘附性、大厚度差胶层的曝光、显影条件等的优化问题。
4·Short-arc mercury xenon lamp, single lamp, double-side exposal.
短弧汞氙灯，单灯，双面曝光。
5·As to metal halide torch with gallium iodide is special rise 403nm and 417nm wave crest, and the highest wave crest 417nm has conspicuousness and good effect to exposal Diazo material.
至于钾掺合卤素灯，特别增强了403nm及417nm的波峰，其最高的417 nm波峰对于diazo材料的曝光有十分显着及良好的作用。