1·The invention belongs to the technical field of microelectronic devices, in particular to a method for forming ultrathin controllable metal silicide.
本发明属于微电子器件技术领域,具体为一种形成超薄可控的金属硅化物的方法。
2·The metal silicide layer prepared by the method has high heat stability and controllable growth speed.
本发明方法制备的金属硅化物层热稳定性高,且生长速度可控。
3·Other silicide layers (50.4-50.6) are on the tops of the source, drain and polysilicon gate.
其它硅化物层(50.4 - 50.6)处于源极、漏极和多晶硅栅极的顶部。
4·Carbene and silylene are two kinds of reactive activity intermediates which belong to carbide and silicide separately, but they are quite similar.
碳烯和硅烯是分属于碳化物和硅化物中的两类反应活性中间体。两者甚为相似。
5·The polysilicon tiles (14.1, 14.2) have silicide layers (50.1, 50.2).
所述多晶硅瓦片(14.1、14.2) 具有硅化物层(50.1、50.2)。